@article {107,
  title = {Towards fabrication of 3D isotopically modulated vertical silicon nanowires in selective areas by nanosphere lithography},
  author = {Mangelinck, D. and Wasisto, H. S. and Sudkamp, T. and Caccamo, L. and Bracht, H. and Descoins, M. and Bertke, M. and Peiner, E. and Hamdana, G.},
  journal = {Microelectronic Engineering},
  pages = {74–82},
  year = {2017},
  volume = {179},
  doi = {10.1016/j.mee.2017.04.030},
  url = {https://metsa.ows.fr/publication/towards-fabrication-3d-isotopically-modulated-vertical-silicon-nanowires-selective},
}