@article {195,
  title = {Lateral growth of NiSi at the theta-Ni2Si/Si(100) interface: Experiments and modelling},
  author = {Panciera, F. and El Kousseifi, M. and Epicier, T. and Hoummada, K. and Mangelinck, D.},
  journal = {MICROELECTRONIC ENGINEERING},
  month = {January},
  pages = {45-51},
  year = {2018},
  volume = {199},
  issn = {0167-9317},
  doi = {10.1016/j.mee.2018.07.014},
  url = {https://metsa.ows.fr/publication/lateral-growth-nisi-theta-ni2sisi100-interface-experiments-and-modelling},
}