@article {203,
  title = {Proposition of a model elucidating the AlN-on-Si (111) microstructure},
  author = {Feuillet, G. and Rennesson, S. and Semond, F. and Vennéguès, P. and Frayssinet, E. and Rouviere, J. L. and Mante, N. and Largeau, L.},
  journal = {JOURNAL OF APPLIED PHYSICS},
  month = {January},
  year = {2018},
  volume = {123},
  issn = {0021-8979},
  doi = {10.1063/1.5017550},
  url = {https://metsa.ows.fr/publication/proposition-model-elucidating-aln-si-111-microstructure},
}