Publications
2017
Mangelinck, D., Wasisto, H. S., Sudkamp, T., Caccamo, L., Bracht, H., Descoins, M., Bertke, M., Peiner, E., Hamdana, G., « Towards fabrication of 3D isotopically modulated vertical silicon nanowires in selective areas by nanosphere lithography », Microelectronic Engineering, vol. 179 , p. 74â82, 2017.DOI, Google Scholar, BibTex